CHEMICAL SUPPORT

摘要

PROBLEM TO BE SOLVED: To provide a chemical support which has excellent volatility by using air permeability and chemical retention function, actualizes a stable use state by preventing leakage of chemical liquid and yet has a simple structure. SOLUTION: The chemical support 1 is equipped with a chemical retention layer 2 having such openings as to retain a chemical liquid by capillary phenomenon on the lower side surface or both the upper and the lower side surfaces of an air-permeable layer 3 forming a mesh in the three-dimensional directions and with a structure as a drive object of rotation by connection between the air-permeable layer 3 and the chemical retention layer 2 in a state that the degree of mesh openings in the air-permeable layer 3 is larger than that of the openings in the chemical retention layer 2 to achieve the problems. COPYRIGHT: (C)2006,JPO&NCIPI