A substrate handling system and method in which an air chuck produces a flim of air between the substrate and the air chuck, a magnetic chuck attracts the substrate to the air chuck, and an actuator subsystem moves the magnetic chuck closer to and away from the air chuck to alternately pick up a substrate and release the substrate.
申请公布号
WO2004106008(A3)
申请公布日期
2006.02.02
申请号
WO2004US17188
申请日期
2004.05.28
申请人
PERKINELMER, INC.;SHAVER, NORMAN, L.;ELLIS, TIMOTHY, A.;HILL, DAVID, R.
发明人
SHAVER, NORMAN, L.;ELLIS, TIMOTHY, A.;HILL, DAVID, R.
