发明名称 Method for producing thin semiconductor films by deposition from solution
摘要 A method is described for producing thin semiconductor films on a substrate by contacting a substrate with a solution containing a metal salt, a source of a Group VIa element, and chelating agent, and a noble metal in its elemental form. The resulting semiconductor films are useful for electronic and photovoltaic applications.
申请公布号 US2006024960(A1) 申请公布日期 2006.02.02
申请号 US20040949604 申请日期 2004.09.24
申请人 发明人 METH JEFFREY S.
分类号 H01L21/4763;C23C18/16;C23C18/18;C23C18/31;H01L21/288;H01L21/368;H01L21/44 主分类号 H01L21/4763
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