| 摘要 |
PROBLEM TO BE SOLVED: To facilitate airtight sealing work to prevent the cracking of a thin quartz piece during the work in a quartz sensor wherein the quartz piece is airtightly sealed on its other surface side using a base body and a sensing substance is adsorbed on one side of the quartz piece to change the natural vibration frequency of the quartz piece. SOLUTION: One exciting electrode and one extraction electrode are formed on one side of the quartz piece, and the other exciting electrode and the other extraction electrode are formed on the other side but the extraction electrode on the other side of the quartz piece is turned toward one side and a pair of support wire members are respectively connected and fixed to the respective extraction electrodes on one side of the quartz piece. By this constitution, the support wire members are not present on the other side of the quartz piece. Further, the frame part provided so as to demarcate the housing region of the quartz piece, the recess formed to the central part of the base of the housing region and a receiver for receiving a holding member are provided as the base body and the frame part is constituted so as to control the position of the peripheral edge of the quartz piece so as to allow the exciting electrodes to face the inside of the recess. COPYRIGHT: (C)2006,JPO&NCIPI
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