| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump which can drastically reduce pulsation and enables a backflow without the need to use a check valve. SOLUTION: This diaphragm pump 1 is provided with a base block 2, a diaphragm 8 and a drive means for driving the diaphragm 8 to reciprocate. The base block 2 has three or more liquid flow paths, and each of the liquid flow paths has three or more recessed parts 23 to 25. The diaphragm 8 and the respective recessed parts 23 to 25 define a plurality of valve chambers and a metering chamber. The drive means includes: pressing rods 73 to 75 arranged sandwiching the diaphragm 8 with respect to each of the recessed parts 23 to 25; and a pressing member drive controlling part capable of performing, at predetermined timing defined for each of the pressing rods 73 to 75, a discharging operation in which each of the pressing rods 73 to 75 is moved toward the recessed parts 23 to 25 so as to gradually reduce the volume of the valve chambers and the metering chamber and finally seal the metering chamber by the diaphragm 8, and a sucking operation in which the each of pressing rods 73 to 75 is moved away from the recessed parts 23 to 25 so as to gradually increase the volume of the valve chambers and metering chamber. COPYRIGHT: (C)2006,JPO&NCIPI
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