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发明名称
METHOD OF MANUFACTURING POLYSILICON LAYER AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR USING THE SAME
摘要
申请公布号
KR20060010563(A)
申请公布日期
2006.02.02
申请号
KR20040059311
申请日期
2004.07.28
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHANG, YOUNG JIN;JANG, JIN;LEE, IN SUNG;MIN, HOON KEE
分类号
H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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