| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gray tone mask having preferable transmittance distribution in a semitransmitting part, a preferable pattern cross sectional form of a light shielding part adjacent to a light transmitting part, and preferable pattern accuracy of a light transmitting part as a gray tone mask having a pattern including a light transmitting part, a light shielding part and a semitransmitting part successively arranged in this order in one direction, and to provide a method for manufacturing the gray tone mask. <P>SOLUTION: The gray tone mask 10 has a pattern comprising a light shielding part, a light transmitting part and a semitransmitting part. The pattern includes a pattern having a light transmitting part, a light shielding part and a semitransmitting part successively arranged in this order in one direction. The light shielding part comprises layers of the light shielding film 13a forming the light shielding part and the semitransmitting film 12a formed in a region excluding a desired margin region in the side of the light shielding part in the border portion of the light transmitting part on the light shielding film 13a. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
