| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator in which the dimensional error of two moving segments can be reduced. SOLUTION: Stators 3, 4 are disposed opposite with each other. The stator 3 has a drive electrode on a surface opposite to the stator 4, and the stator 4 has a holding electrode on a surface opposite to the stator 3. The moving segments 5, 6 are disposed between the stators 3, 4 movably in a given direction. The moving segments 5 have the drive electrode 5a on the surface opposite to the drive electrode, and has the holding electrodes 5b, 5c on the surface opposite to the holding electrode. The moving segment 6 has the drive electrode 6a on the surface opposite to the drive electrode, and has the holding electrodes 6b, 6c on the surface opposite to the holding electrode. The moving segments 5, 6 have the same shape and are disposed side by side in mutually opposite directions with respect to a given direction. The holding electrodes 5b, 5c, 6b, 6c are disposed in positions preventing the electrodes from being overlapped with each other, when being projected on a surface perpendicular to the given direction. COPYRIGHT: (C)2006,JPO&NCIPI
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