| 摘要 |
PROBLEM TO BE SOLVED: To grasp at least one sample region in a short period of time using an optical raster microscope through a first scanning means, which scans along at least one scanning axis that is essentially normal to an illuminating axis, by relative movement between the illumination light beams and the sample. SOLUTION: A second scanning means moves along a direction having a certain angle with respect to a relative movement plane, especially normal to the plane, the movement of the first and the second scanning means is coupled and a three dimensional reading movement is conducted by the illumination within the sample to receive an image. The second scanning means is coupled with the movement of the first scanning means and is moved along at least one scanning direction of the first scanning means, the scanning direction of the second scanning means and moved to scan the line that is extending the spreading and/or a curve and/or a plane and/or a curved surface. COPYRIGHT: (C)2006,JPO&NCIPI
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