| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor for gas concentration detection, which can continuously perform measurement in an exhaust gas which needs platform chip heating for detecting and measuring a gas component such as O<SB>2</SB>detected in an area between 650-950°C or has a high temperature exceeding 600°C. SOLUTION: In the platform chip or high-temperature stable sensor having a conductor structure exposed to an external influence, the conductor structure has a conductive oxide and/or the part of the conductor structure has a resistance characteristic curve continuously stable, particularly, under a high-temperature load between 600 and 950°C. Further, the method for manufacturing a platform chip or sensor, a suspension has a noble metal particle, and the noble metal particle is smaller than 50 nm, particularly, 20 nm. COPYRIGHT: (C)2006,JPO&NCIPI
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