| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for minimizing the incoming of external noises affecting a measurement system without introducing any special and effective device such as a low-current measurement prober in measuring noise (1/f noise, etc.) of a semiconductor element. SOLUTION: A small-sized module is provided with only functions necessary for a gate-side filter 17 and for a drain-side preamplifier 13, these affecting the measurement on the 1/f noise of a MOS device 11, and is directly connected to a manipulator equipped with a probe, thereby reducing the affect of the extraneous noises. COPYRIGHT: (C)2006,JPO&NCIPI
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