| 摘要 |
PROBLEM TO BE SOLVED: To measure the diameter of a scanning laser beam at any scanning angle. SOLUTION: A photosensor 33 and beam detectors 34 and 35 are arranged in a straight line on a scanning line of the scanning laser beam. A computer acquires a two-dimensional profile of the scanning laser beam by differentiating output signals from the photosensor 33 for every angle of rotation of a rotary knife edge 25 and acquires a there-dimensional profile by performing mapping addition on the two-dimensional profile. The diameter of a part of which the intensity is 1/e<SP>2</SP>when a peak value of the there-dimensional profile is 1 is taken as the diameter of the scanning laser beam. COPYRIGHT: (C)2006,JPO&NCIPI
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