摘要 |
PROBLEM TO BE SOLVED: To provide techniques of producing a nitride single crystal by which a high-quality nitride single crystal can be produced by a sublimation method. SOLUTION: A source material 9 for a nitride single crystal is heated and sublimated in a heating furnace 1, and the sublimated source material is crystallized on a seed crystal 7 disposed in the furnace to grow a single crystal. In the above method for producing a nitride single crystal, a mixture source material preliminarily prepared by mixing an appropriate amount of carbon in aluminum nitride as a source material is heated and sublimated. COPYRIGHT: (C)2006,JPO&NCIPI
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