发明名称 Method for forming a planar mirror using a sacrificial oxide
摘要 A micro electromechanical system (MEMS) mirror, comprising a displaceable hinged member, a mirror plate, and a plurality of mirror support elements. The mirror plate has a planar mirror face affixed thereto. The plurality of mirror support elements extend between the displaceable hinged member and the mirror plate.
申请公布号 US2006024620(A1) 申请公布日期 2006.02.02
申请号 US20040909074 申请日期 2004.07.30
申请人 NIKKEL ERIC L;MONROE MICHAEL G;SZEPESI MICKEY 发明人 NIKKEL ERIC L.;MONROE MICHAEL G.;SZEPESI MICKEY
分类号 G02B26/08 主分类号 G02B26/08
代理机构 代理人
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