| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source apparatus which focuses efficiently emitted beams from light sources, and attains such an optical system as to obtain a light quantity having a narrow emission angle which can be utilized effectively in a final inspecting portion. <P>SOLUTION: The light source apparatus is an inspecting light source apparatus having light sources and a light guiding body for so inputting the emitted beams from the light sources as to emit the inputted beam in the direction of an inspected object. That is, a first reflecting means is provided in such a portion as not to interfere with the emitted beams from the light sources, and reflects in the direction of the foregoing emitted beams the reflected beams by a second reflecting means. Also, the second reflecting means is provided in a position existent near the end surface of the incident-light side of the light guiding body, and reflects in the direction of the first reflecting means the emitted beams from the light sources. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
