| 摘要 |
PROBLEM TO BE SOLVED: To provide a burning device capable of reducing device costs by reducing electric power consumption and reducing a breadthwise size of the device. SOLUTION: The burning device is provided with a kiln 11, heaters 12 respectively provided on both inner side faces of the kiln 11, a conveyance device 13 having two conveyance paths extending in a kiln length direction with an interval in between and conveying a substrate P on each conveyance path in a state erected in parallel with a conveyance direction, and an air supply pipe 31 and an exhaust pipe 32 laid between both conveyance paths. COPYRIGHT: (C)2006,JPO&NCIPI
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