| 摘要 |
PROBLEM TO BE SOLVED: To provide a removing method for organic matters, in which organic matter, especially, resist sticking on a substrate surface can be removed very easily and safely with high efficiency, and to provide an organic matter removing device for implementing the organic matter removing method. SOLUTION: The method is disclosed for removing organic matter sticking on the substrate surface by supplying an ozone solution to the substrate. The ozone solution is prepared, by dissolving ozone in at least one kind of organic solvent selected from among a group ofγ-butyl lactone, ethylene glycol diacetate, and diacetone. COPYRIGHT: (C)2006,JPO&NCIPI
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