DIELECTRIC MULTILAYER FILM MIRROR

摘要

PROBLEM TO BE SOLVED: To eliminate the need of very troublesome optical axis aligning operation and to facilitate dispersion compensation. SOLUTION: A layer obtained by alternately laminating a plurality of low refractive index thin films and a plurality of high refractive index thin films is used as a dielectric multilayer film, and the film thickness of the multilayer film is set as inclined film thickness, whereby secondary group speed dispersion amount is adjusted according to a spot at which light is cast. Then, SiO2is used as the low refractive index thin film and Ta2O5is used as the high refractive index thin film. COPYRIGHT: (C)2006,JPO&NCIPI