发明名称 Production process and production system of magnetic recording medium
摘要 A manufacturing method of a magnetic recording medium, and the like are provided, which can suppress misalignment of a processed shape of divided recording elements and magnetic degradation and can efficiently manufacture a magnetic recording medium having good magnetic characteristics. In the manufacturing method, ion beam etching is used as a dry etching technique for a continuous recording layer 20 . Before dry etching of the continuous recording layer 20 , a resist layer 26 is removed. As the material for a first mask layer covering the continuous recording layer, diamond like carbon is used.
申请公布号 US2006021966(A1) 申请公布日期 2006.02.02
申请号 US20050535265 申请日期 2005.05.17
申请人 HATTORI KAZUHIRO;TAKAI MITSURU;OKAWA SHUICHI 发明人 HATTORI KAZUHIRO;TAKAI MITSURU;OKAWA SHUICHI
分类号 C23F1/00;G11B5/855;H01L21/306 主分类号 C23F1/00
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