摘要 |
A (MEMS)-based gas sensor assembly (35) for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. Such gas sensor assembly in a preferred embodiment comprises a free-standing silicon carbide (4) support structure having a layer of a gas sensing material, preferably nickel or nickel alloy, coated thereon. Such gas sensor assembly is preferably fabricated by micro-molding techniques employing sacrificial molds (16) that are subsequently removable for forming structure layers. |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC.;DIMEO, FRANK, JR.;CHEN, PHILIP, S.H.;CHEN, ING-SHIN;NEUNER, JEFFREY, W.;WELCH, JAMES |
发明人 |
DIMEO, FRANK, JR.;CHEN, PHILIP, S.H.;CHEN, ING-SHIN;NEUNER, JEFFREY, W.;WELCH, JAMES |