INERTIAL SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an inertial sensor having a constitution capable of improving impact resistance even if the inertial sensor is an inertial sensor of an acceleration sensor and a gyroscope provided with a three-dimensionally movable part and simultaneously achieving a compact and low profile.

SOLUTION: The inertial sensor comprises a fixed part; a weight part lower in height than the fixed part by the amount of a prescribed size; a sensor part having beam part for connecting the weight part to the fixed part; a plate-like first stopper part covering the weight part and fastened to the fixed part with a void of a prescribed size to the weight part; and a flat-plate-like second stopper part connected to the fixed part via a bump of a prescribed height on the side opposite to the first stopper part.

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