| 摘要 |
An electrostatic holding device ( 100 ) in which an electrode group ( 103 ) having a plurality of electrodes covered with an insulating material ( 102 ) is used as a holding surface applies predetermined voltage to the electrode group ( 103 ) to hold a holding object ( 104 ) by an electrostatic force with a contact state or with a floating non-contact state. The electrostatic holding includes an internal polarization eliminating device (applied voltage control portion 105 ) to eliminate the internal polarization generating in the insulating material ( 102 ) by switching the polarity of voltage to be applied to the electrode group ( 103 ). There are provided with the electrostatic holding device in which the electrostatic attraction does not deteriorate by usability, and electrostatic tweezers in which the electrostatic attraction does not deteriorate when the tweezers are manually used.
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