| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensitive adhesive sheet 1 which can slect its adhesion according to its use and can simply and reliably remove foreign matters adhering to a precise electronic component 10 and a treatment apparatus of the precise electronic component 10 without causing the damage, corruption and contamination of the precise electronic component 10 and without obstructing a carrying in the treatment apparatus, ans to provide a method for removing the foreign matters by using the pressure sensitive adhesive sheet 1. SOLUTION: The pressure sensitive adhesive layer 3 is formed of a pressure sensitive adhesive in which organic microbaloon 3a and reinforcement addition agent 3b are blended. The pressure sensitive adhesive layers 3 each having properties, that a cushion index is≥1.50, a diameter of a dice nozzle is 1.0 mm, a temperature is 100°C and a plastic deformation flow rate under a discharge conditions of 20 kg loading is <10×10<SP>-2</SP>ml/sec, are formed on one or both sides of the sides of a supporting film 2, thereby obtaining the pressure sensitive adhesive sheet 1 for removing the foreign matters. COPYRIGHT: (C)2006,JPO&NCIPI
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