Polarizer device for illumination system, has interference device converting light beam with angular distribution to another beam, and decoupling device receiving latter beam and emitting beam with another angular distribution

摘要

The device has an angle variable launching device (150) for receiving an incoming light beam and producing a light beam with a provided angular distribution. An angle selective polarization interference device (160) converts the light beam into another light beam based on a defined angular function. An angle variable decoupling device receives the latter light beam and emits the latter beam with another angular distribution. An independent claim is also included for an illumination system of a microlithography-projection illumination arrangement.