| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for copolymerization of borazine system monomer and siloxane system monomer without using platinum. SOLUTION: A first source tank is charged with borazine system compound, and a second source tank is charged with silicon system compound. An insulating film is formed by a plasma polymerization method by using the compounds as a starting substance. In the process, a part or an entire of a piping path from the first and second source tanks to a film formation device for executing the plasma polymerization method is provided with heating means, and it is preferable to provide a temperature gradient so that they raise the temperature as they come near the film formation device. COPYRIGHT: (C)2006,JPO&NCIPI
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