INSPECTION DEVICE OF OPTICAL SURFACE CHARACTERISTICS AND INSPECTION METHOD USING IT

摘要

PROBLEM TO BE SOLVED: To resolve even the change caused in surface coating at the time of inspection of optical surface characteristics when observation is performed by slightly changing a solid angle. SOLUTION: This inspection device for optical surface characteristics is equipped with at least one first irradiator for irradiating an inspection surface with light at a given first solid angle, at least one first detector for catching the light reflected from the irradiated inspection surface to be returned therefrom and resolving a position to detect the light and at least one further irradiator or a second detector arranged with respect to the inspection surface at a given solid angle and irradiating the inspection surface with light at a given third solid angle or detecting the light thrown on the inspection surface to be reflected and returned therefrom. COPYRIGHT: (C)2006,JPO&NCIPI