| 摘要 |
PROBLEM TO BE SOLVED: To provide an inhalation unit assembly which can easily remove the liquid foreign matter, and the like, on a substrate surface by generating inhalation force due to the unidirectional flow of a pressure fluid, like gas, and more particularly can additionally improve not only inhalation efficiency for removal of the liquid foreign matter but the treatment quality of the substrate by acting the uniform inhalation force on the surface over the entire part of the substrate. SOLUTION: This inhalation unit assembly which can remove the foreign matter by utilizing the ambient pressure difference generated by the atmosphere where the pressure fluid like the gas flows is equipped with a gas feed unit having: a pressure gas generating means, a feed passage communicating with the pressure gas generating means; and a discharge space section on one side, and a guide unit having a guide passage for guiding the pressure gas generated from the pressure gas generating means in such a manner that the gas flows from the feed passage to a discharge space section, and an inflow unit having an inhalation passage which communicates with the guide passage and in which a negative pressure is formed by the flow of the pressure gas. COPYRIGHT: (C)2006,JPO&NCIPI
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