| 发明名称 |
Reduction in size of hemispherical grains of hemispherical grained film |
| 摘要 |
A hemispherical grained (HSG) film is oxidized to form an oxidized layer at the surface part of the HSG film, and then the oxidized layer is etched to be removed. The size of the hemispherical grains after etching is smaller than that as formed.
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| 申请公布号 |
US2006021570(A1) |
申请公布日期 |
2006.02.02 |
| 申请号 |
US20050192312 |
申请日期 |
2005.07.29 |
| 申请人 |
HASEBE KAZUHIDE;KIMURA NORIFUMI;FUJITA TAKEHIKO;FURUSAWA YOSHIKAZU |
发明人 |
HASEBE KAZUHIDE;KIMURA NORIFUMI;FUJITA TAKEHIKO;FURUSAWA YOSHIKAZU |
| 分类号 |
C30B23/00;B05C11/00;H01L21/26 |
主分类号 |
C30B23/00 |
| 代理机构 |
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代理人 |
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