发明名称 HEAT EXCHANGE METHOD AND HEAT EXCHANGING APPARATUS, EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a heat exchange method for cooling or heat recovery which realizes power-saving, highly efficient, inexpensive and miniaturized apparatus, and extremely stable temperature control against fluctuation in a load or fluctuation in factory cooling water when the factory cooling water whose temperature is lower than predetermined temperature is supplied. <P>SOLUTION: The heat exchange method is provided for a heat exchanger in which heat exchange between a first medium and a second medium is performed and the temperature of the first medium is controlled, wherein the temperature of the first medium at the exit side of the heat exchanger and the temperature of the first medium and the temperature of the second medium at the entrance side of the heat exchanger are detected. On the basis of the target temperature of the first medium and the temperature of the first medium and the temperature of the second medium at the entrance side of the heat exchanger detected in the detection process, the flow rate of the second medium is adjusted and the temperature of the first medium at the exit side of the heat exchanger is controlled. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006031113(A) 申请公布日期 2006.02.02
申请号 JP20040205061 申请日期 2004.07.12
申请人 CANON INC 发明人 OKADA YOSHIYUKI
分类号 G06F1/20;F28F27/00;G03F7/20;H01L21/027 主分类号 G06F1/20
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