| 发明名称 |
LIGHT SOURCE DEVICE, AND EXPOSURE DEVICE EQUIPPED WITH SAME |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device capable of keeping the light to be supplied at a prescribed position relative to a reference point, and to provide an exposure device equipped with the light source device for excellent exposure performance. <P>SOLUTION: The light source device generates plasma and supplies the light radiated from the plasma. The light source device comprises a keeping means for keeping the position of the light radiated from the plasma. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2006032578(A) |
申请公布日期 |
2006.02.02 |
| 申请号 |
JP20040207856 |
申请日期 |
2004.07.14 |
| 申请人 |
CANON INC |
发明人 |
YAMAMOTO TAKESHI;MIYAKE AKIRA |
| 分类号 |
H01L21/027;G03F7/20;G21K5/08;H05G2/00 |
主分类号 |
H01L21/027 |
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