| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for temporally stable formation of EUV-ray using plasma induced by lasers. <P>SOLUTION: At least one laser (1) is directed toward a target (3), in which the laser (1) has at least a prescribed plane (11;14) having a space distribution with very stable output density of the laser (1), the prescribed plane (11;14) is imaged on a target (3) by an optical imaging system (2), and an optical image (22) of the prescribed plane (11;14) is reduced so as to work for formation of the plasma instead of a laser focus (13). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
