ANGULAR VELOCITY SENSOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor element for further facilitating manufacture by improving detection sensitivity of an angular velocity (Coriolis force).

SOLUTION: The angular velocity sensor element has a drive electrode exciting tuning fork vibration on one tuning fork arm of a tuning fork quartz piece, and has two sets of sensor electrodes comprising inside electrodes and outside electrodes for detecting charges of different signs being mutually reverse electric fields in both principal plane sides between an inside face and an outside face respectively on the other tuning fork arm of the tuning fork quartz. Each inside electrode from among the two sets of the sensor electrodes is independent by being provided on both the principal planes, and electrically connected to each outside electrode having the same sign.

COPYRIGHT: (C)2006,JPO&NCIPI