INCLUSION MEASURING METHOD AND INCLUSION MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To rapidly and precisely measure the particle size of an inclusion present in a metal sample. SOLUTION: A condenser with a capacity of 8-16μF is used as a discharge producing condenser 52a constituting the discharge circuit 52A of a light emitting device 52 to produce pulse discharge under the condition that voltage is 300-500V and a discharge time per one pulse is 80-190μh to subject the inclusion present on the surface to be inspected of the metal sample to emission spectral analysis. The maximum particle size of the inclusion present on the inspection reference area of the metal sample is measured on the basis of the result due to emission spectral analysis and statistical processing based or an extreme value statistical method is performed using the maximum particle size to measure the estimated maximum particle size of the inclusion present on an area for performing the estimation of the metal sample. COPYRIGHT: (C)2006,JPO&NCIPI