| 摘要 |
The invention relates to a microscope and a method for measuring the surface topography of a workpiece in a quantitative and optical manner. The invention includes a differential interference contrast microscope embodiment according to Nomarski, comprising a light source, a polariser, a changeable Nomarski prism and an analyser. The light source has a narrow frequency spectrum and/or is provided with a special filter having a narrow frequency spectrum; and the microscope is provided with a phase displacement interferometry evaluation unit.
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