| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrier for holding a material to be polished having excellent durability and wear resistance. <P>SOLUTION: This carrier for holding the material to be polished is provided with a resin-made frame mounted on the inner edge part thereof, and has one or more holes for holding the material to be polished. In the carrier for holding the material to be polished, the surface of the carrier base material in a part made of metal is coated with material which is the same as the carrier base material or has a higher hardness. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
