| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing pad capable of enhancing sticking property to a surface plate, a polishing device provided with it and a sticking device. <P>SOLUTION: A plurality of projections 2b and a plurality of grooves 2a are formed on a polishing member 2. The grooves 2a are formed to a lattice shape. A plane shape of a part (polishing part 3) formed with the grooves 2a and the projections 2b substantially becomes a circle. An outer peripheral part 4 having constant height is provided on a periphery of the polishing part 3. The height of the outer peripheral part 4 becomes the same as the height of a bottom part of the groove 2a. Ends of the respective grooves 2a extend to the outer peripheral part 4 and a slurry or the like intruded into the groove 2a flows out to the outside through the outer peripheral part. When the thus constituted polishing pad is stuck to the surface plate 10, after an adhesive is coated on a back surface of a base member 1 or a double-faced tape is stuck thereto, the polishing pad is arranged on the surface plate 10. Next, the polishing part 3 is pressed to the surface plate 10 from above and subsequently the outer peripheral part 4 is pressed to the surface plate 10 from above. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
