ALUMINUM PLASMA CHAMBER AND METHOD FOR MANUFACTURING THE SAME

摘要

Disclosed are an aluminum plasma chamber and a method for manufacturing the same. The present invention provides an aluminum plasma chamber capable of maintaining airtightness and electric conductivity of the chamber, as well as reducing the manufacturing cost and time of the aluminum chamber, and improving the surface treatment by separately processing a chamber lid, a chamber wall and a chamber bottom, which constitute the aluminum plasma chamber, to connect them to each other using a coupling member such as a bolt, as well as inserting sealing members such as an O-ring and conductive members into coupling regions between the chamber lid, the chamber wall and the chamber bottom, and a method for manufacturing the same.