TRANSPORT SYSTEM OF WASHING APPARATUS FOR CHEMICAL MECHANICAL POLISHING AND METHOD THEREOF,申请号KR20040058764-传众专利搜索

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发明名称	TRANSPORT SYSTEM OF WASHING APPARATUS FOR CHEMICAL MECHANICAL POLISHING AND METHOD THEREOF
摘要
申请公布号	KR20060010158(A)	申请公布日期	2006.02.02
申请号	KR20040058764	申请日期	2004.07.27
申请人	HYNIX SEMICONDUCTOR INC.	发明人	WOO, CHANG SOO
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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