发明名称 DMOS transistor and corresponding manufacturing method
摘要 Production of a DMOS transistor with a lateral drain extension involves the deposition on a gate substrate (53) presenting two essentially parallel lateral surfaces, then defining a drain spacer (51) and a source spacer (52) in an insulating material on the lateral surfaces of the gate, respectively drain side and source side of the transistor. The drain spacer has a width strictly greater than a width of the source spacer. An independent claim is also included for a DMOS transistor with a lateral drain extension obtained.
申请公布号 EP1622203(A2) 申请公布日期 2006.02.01
申请号 EP20050366004 申请日期 2005.06.02
申请人 STMICROELECTRONICS S.A. 发明人 SZELAG, BERTRAND
分类号 H01L29/78;H01L21/336;H01L29/45;H01L29/49 主分类号 H01L29/78
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