| 发明名称 |
Emitter for an ion source and method of producing same |
| 摘要 |
<p>An emitter (100) for a liquid metal ion source is provided, said emitter comprising a wire (110), the wire comprising: a bend portion (115) and a surface (120); wherein at least a portion (125) of the wire surface (120) is tapered at the bend portion (115) to form an emitter tip. Furthermore, a manufacturing method for such an emitter is provided.</p> |
| 申请公布号 |
EP1622184(A2) |
申请公布日期 |
2006.02.01 |
| 申请号 |
EP20050016351 |
申请日期 |
2005.07.27 |
| 申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
PILZ, WOLFGANG;BISCHOFF, LOTHAR |
| 分类号 |
H01J27/26;H01J37/08 |
主分类号 |
H01J27/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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