Through electrode and method for forming the same

摘要

A method for forming a through electrode (24) is disclosed. The through electrode integrally comprises a columnar electrode (30) filling a through hole (24), a lower end electrode pad formed (32) on a lower end side of the columnar electrode and having an area wider than the cross section of the through hole, and an upper end electrode pad (34) formed on an upper end side of the columnar electrode and having an area wider than the cross section of the through hole. The lower end electrode pad is arranged to occlude a lower end opening of the through hole. The columnar electrode fills the through hole by laminating copper on the lower end electrode pad.