Ink jet head substrate, ink jet head, and method of manufacturing an ink jet head susbstrate

摘要

An ink jet head substrate (10), an ink jet head and a method of manufacturing an ink jet head substrate are provided. The ink jet head substrate (10) includes a substrate (12) having an ink ejection region (12a). An interlayer insulating layer is formed on the substrate. A plurality of pressure-generating elements (R) that generate pressure to eject ink are disposed on the interlayer insulating layer to form a predetermined array. Segment heaters (H) that heat the substrate are disposed at predetermined positions on the substrate. The segment heaters are electrically connected to each other by heater wirings (34b).