| 发明名称 |
Methods of making an integrated waveguide photodetector |
| 摘要 |
An integrated waveguide and photodetector which are evanescently coupled, and methods of making such integrated waveguide and photodetector.
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| 申请公布号 |
US6991892(B2) |
申请公布日期 |
2006.01.31 |
| 申请号 |
US20030392363 |
申请日期 |
2003.03.17 |
| 申请人 |
INTEL CORPORATION |
发明人 |
BLOCK BRUCE A. |
| 分类号 |
G03F7/26;G02B6/12;G02B6/42 |
主分类号 |
G03F7/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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