| 发明名称 |
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus |
| 摘要 |
A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.
|
| 申请公布号 |
US6992763(B2) |
申请公布日期 |
2006.01.31 |
| 申请号 |
US20040864035 |
申请日期 |
2004.06.08 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KISHIKAWA YASUHIRO;TAKEUCHI SEIJI |
| 分类号 |
G01J4/00;G02B27/12;G03F7/20 |
主分类号 |
G01J4/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
