发明名称 Fault detection spanning multiple processes
摘要 A method and apparatus is provided for fault detection spanning multiple processes. The method comprises receiving operational data associated with a first process, receiving operational data associated with a second process, which is downstream to the first process and performing fault detection analysis based on the operational data associated with the first process and second process using a common fault detection unit.
申请公布号 US6991945(B1) 申请公布日期 2006.01.31
申请号 US20020231911 申请日期 2002.08.30
申请人 ADVANCED MICRO DEVICES, INC. 发明人 CASTLE HOWARD E.;PURDY MATTHEW A.;CHERRY GREGORY A.;MARKLE RICHARD J.;GREEN ERIC O.;MILLER MICHAEL L.;CUSSON BRIAN K.
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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