发明名称 Apparatus and method for die attachment
摘要 The invention provides an apparatus for die attachment onto a substrate including non-metallic material, and metallic material that is adapted to receive a die having a eutectic coating. A heating conduit is provided through which the substrate is movable for heating the metallic material to a eutectic bonding temperature to facilitate bonding between the die and the metallic material at a die-attach position. An induction heating device at the die-attach position heats the metallic material of the substrate to the eutectic bonding temperature prior to attaching a die onto the metallic material.
申请公布号 US6991967(B2) 申请公布日期 2006.01.31
申请号 US20040785293 申请日期 2004.02.23
申请人 ASM ASSEMBLY AUTOMATION LTD. 发明人 LIU DEMING;FU RAN;LAM KUI KAM;NG MAN CHUNG RAYMOND;CHEUNG WAI YUEN
分类号 H01L21/44;H01L21/52;H01L21/00;H01L21/60;H01L23/498 主分类号 H01L21/44
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