发明名称 |
Scanning systems and methods for providing ions from an ion beam to a workpiece |
摘要 |
Ion implantation scanning systems and methods are presented for providing ions from an ion beam to a treatment surface of a workpiece, wherein a beam is electrically or magnetically scanned in a single direction or plane and an implanted workpiece is rotated about an axis that is at a non-zero angle relative to the beam scan plane, where the workpiece rotation and the beam scanning are synchronized to provide the beam to the workpiece treatment surface at a generally constant angle of incidence.
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申请公布号 |
US6992310(B1) |
申请公布日期 |
2006.01.31 |
申请号 |
US20040917997 |
申请日期 |
2004.08.13 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
FERRARA JOSEPH;GRAF MICHAEL A.;VANDERBERG BO H. |
分类号 |
H01J37/317;H01J37/20 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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