发明名称
摘要 A stencil mask for semiconductor processes comprises: (a) a thin film conductor (2) with openings (7) cut into the film; (b) an insulator film (4) formed in the region of the thin film conductor with the exclusion of the openings; (c) a conductor support (3A) formed on the insulator film; and (d) a conductor element (6) formed so that it crosses the insulator film and connects the conductor support and the thin film conductor electrically. An Independent claim is also included for the production of a stencil mask.
申请公布号 KR100547547(B1) 申请公布日期 2006.01.31
申请号 KR20030097622 申请日期 2003.12.26
申请人 发明人
分类号 G03F1/14;H01L21/027;B05C11/11;B32B9/00;B32B9/06;G03C5/00;G03F1/00;G03F1/16;G03F1/20;G03F1/60;G03F7/00;G03F9/00;G21K5/00;H01L21/00;H01L21/033;H01L21/265;H01L21/266 主分类号 G03F1/14
代理机构 代理人
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