УСТРОЙСТВО МИКРОПЕРЕМЕЩЕНИЙ

摘要

FIELD: research instrumentation engineering. ^ SUBSTANCE: proposed device that can be used in scanning probe microscopes and nanotechnology units for microdisplacement of objects has base, piezoelectric tube with electrodes one of whose ends is secured on base and other one is provided with first support. Second support is joined with base and disposed inside piezoelectric tube under object being displaced. The latter is disposed either on one of two supports or on both supports at a time. ^ EFFECT: enlarged functional capabilities, enhanced precision of positioning. ^ 1 cl, 4 dwg