发明名称 FOCUSING AN OPTICAL BEAM TO TWO FOCI
摘要 <p>A Plate polarising beam splitter 22 splits an incident laser beam 21 to form a first laser beam 24 and a second laser beam 25. The first laser beam is optically modified using an arcuate reflector 23 so that the first laser beam has a different divergence or convergence from that of the second laser beam. The first laser beam 24 is focussed at a first focus 27 on an optical axis of a focussing lens 26 and the second laser beam is focussed at a second focus 28 on the optical axis for machining a workpiece. The apparatus is suitable for machining with the laser beams steered by a galvanometer scanner.</p>
申请公布号 KR20060009019(A) 申请公布日期 2006.01.27
申请号 KR20057022977 申请日期 2004.05.27
申请人 XSIL TECHNOLOGY LTD. 发明人 KRISHNAN VENKATAKRISHNAN;BO TAN
分类号 B23K26/067;B23K26/00;B23K26/38;H01L21/78 主分类号 B23K26/067
代理机构 代理人
主权项
地址