发明名称 |
FOCUSING AN OPTICAL BEAM TO TWO FOCI |
摘要 |
<p>A Plate polarising beam splitter 22 splits an incident laser beam 21 to form a first laser beam 24 and a second laser beam 25. The first laser beam is optically modified using an arcuate reflector 23 so that the first laser beam has a different divergence or convergence from that of the second laser beam. The first laser beam 24 is focussed at a first focus 27 on an optical axis of a focussing lens 26 and the second laser beam is focussed at a second focus 28 on the optical axis for machining a workpiece. The apparatus is suitable for machining with the laser beams steered by a galvanometer scanner.</p> |
申请公布号 |
KR20060009019(A) |
申请公布日期 |
2006.01.27 |
申请号 |
KR20057022977 |
申请日期 |
2004.05.27 |
申请人 |
XSIL TECHNOLOGY LTD. |
发明人 |
KRISHNAN VENKATAKRISHNAN;BO TAN |
分类号 |
B23K26/067;B23K26/00;B23K26/38;H01L21/78 |
主分类号 |
B23K26/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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